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Hi Peter,
I can't start by reproducing your results because the Pre_Deconv image has a different crop to the masks and the PostDecon image, but... I think the problem you are having is just that you're trying to do a heavy decon on the nebula and this is too heavy on the stars (a perfectly deconvoluted star will become a point source.)
If you want to go that heavy then you'll need to do something like Lee suggested and remove the brighter star cores from the luminance mask. You could subtract a suitably constructed star mask or use PixelMath, e.g. "iif($T>0.6,0,$T)" followed by a slight Convolution blur to take out the star cores.
Cheers,
Rick.
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